Localized heating and thermal characterization of high electrical resistivity silicon-on-insulator sensors using nematic liquid crystals
نویسندگان
چکیده
silicon-on-insulator sensors using nematic liquid crystals Oguz H. Elibol, Bobby Reddy, Jr., and Rashid Bashir Birck Nanotechnology Center and School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47906, USA Micro and Nanotechnology Laboratory and Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA Micro and Nanotechnology Laboratory, Department of Electrical and Computer Engineering, Department of Bioengineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA
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